Tailoring the crystal growth of quartz on silicon for patterning epitaxial piezoelectric films
Qianzhe Zhang, David Sanchez-Fuentes, Andrés Gomez, Rudy Desgarceaux, Benoit Charlot, Jaume Gazquez, Adrian Carretero-Genevrier, Martí Gich
Nanoscale Advances 1, 3741-3752, 2019
DOI: 10.1039/c9na00388f
Figure: The systematic study of chemical solution deposition parameters has made possible finding the optimal conditions to prepare structured epitaxial quartz films on silicon by soft lithography.