Technicians in charge: Neus Romà, Luigi Morrone, Marta Riba (until March 2019) and Marta Gerbolés
Scientist in charge: Teresa Puig

Scientific & Technical Services

Nanoquim: Clean Room Facility

The Nanoquim Platform offers five independent cleanroom facilities classified as ISO7, which corresponds to a Class 10,000 cleanroom according to FED STD 209E. These labs are equipped to develop different types of chemical and physical processes, like the physico-chemical synthesis and characterization of nanostructured materials.

Scientific equipment available

Advanced Optical Lithography Lab
  • Photolithography Fume Hood: Photolithography hood equipped with an AC 6000 Spinner, a precision hotplate, a hot/stirring plate and an ultrasonic bath forworking with photoresists.
  • Micro-Writer ML3: A last generation micro-writing device with high performance laser-assisted technology.
  • Ellipsometer GES5E from Sopra (with porosimeter): Allows various measurement modes from standard to generalized ellipsometry, going through photometric measurements, scatterometry and luminescence measurements. Allows for the characterization of thin films’ properties like composition, roughness or thickness through changes in polarization.
  • Plasma Cleaner Zepto M2: Low-pressure plasma technology that allows for surface alterations like etching and activation processes, precision cleaning and polymerization on surface.
  • Optical Microscope Nikon Optiphot: The Optical Microscope Nikon Optiphot is a suitable equipment for a fast evaluation of photolithographic experiments. 
Characterization at the Nanoscale of Functional Materials Lab
  • IR-Spectrometer Vertex 70 from Bruker: Fully digital FT-IR spectrometer for signal acquisition from the far IR region. Equipped with MTC and TGS detectors.
  • Binocular Loupe: For the fast evaluation of samples.
  • Optical Microscope B-600 MET: A versatile tool for several processes in the laboratory.
  • Ultrasonic Wire Bonder 4526: Manual Ball Bonding System that provides the high yield and excellent repeatability needed for every gold ball bonding
  • Profilometer P16+ from KLA Tencor: Surface metrology analysis solution with applications in R&D Departments, Universities, production and process monitoring.
Physico-Chemical Characterization and Nanofabrication Lab
  • Spectrofluorometer LS 45: This fluorescence spectrometer offers versatility and reliability for routine analyses, using a range of accessories and software for many applications.
  • Atomic Layer Deposition System Savannah: Designed to deposit pinhole free coating with uniform thickness, with precise controls and high film quality.
  • Rheometer HAAKE RheoStress RS600: Fully modular, upgradeable controlled stress research rheometer that suits a wide range of requirements, allowing for shear and stress controlled flow curves, stress controlled ramps, creep and recovery, oscillating tests and temperature control tests, amongst others.
  • Reactive Ion Etcher RIE 2000 CE: Provides a clean environment for anisotropic etching of several materials. Equipped with oxygen, argon and tetrafluoromethane gases together with mixtures of oxygen/tetrafluoromethane.
  • Metal Evaporator System Auto 306: Achieves high vacuum values for an optimal physical deposition of the target (gold, chromium, aluminum, titanium, silver, among others) to the sample. 
  • Ion Milling/Sputtering/E-Beam System: Combination of three systems in one that allows for different
  • Centrifuge Allegra 64R: Brushless, induction drive refrigerated centrifuge that performs routine spins on the lab bench for high-speed separations.
  • Stove UNB 500 from Memmert: This Stove is thought for drying material.
Chemical Synthesis Lab
  • Basic I-Solvents: Fume hood for working with solvents or non-corrosive substances.
  • Basic II-Acids & Corrosives: Fume hood for working with corrosive substances.
  • Vacuum Line: Equipped with a cold trap and four manifolds for simultaneous work within a fume hood.
  • Rotary Evaporation System R-210/215: For faster and more effective evaporation of the more volatile solvent in a solution.
  • Spin Coater Spinner CZ-650: Allows for the deposition of substrates over surfaces by fast rotation.
  • Glove Box GP(Concept)-II-P: Constantly purified and over pressurized nitrogen environment to develop processes sensitive to oxygen and water.
  • Microwave Oven with controlled atmosphere Discover Explorer Hybrid from CEM: The system facilitates either homogenous or heterogeneous solution phase chemistry, solid phase chemistry or chemistry conducted on solid supports, under controlled conditions.
  • Microwave from Milestone: Equipped with several accessories for a range of experiments, with a focus on liquid-liquid synthesis, solid-solid synthesis, and for digestion experiments.
  • Drop Shape Analyzer DSA 100: With a manual drop system and many options for contact angle measurements. Equipped with a software loaded with different models to determine the contact angle and surface tension of a liquid.
  • Nano Dip Coater ND-DC: Microprocessor controlled system developed for the fabrication of thin films by wet deposition, useful for the development of homogeneous films.
Highly Control Humidity Lab
  • ICMAB-CSIC Ink-jet Printer: ICMAB’s own prototype.
  • Rapid Thermal Annealing Furnace: For the thermal treatment of samples up to 1200ºC, developed specifically for research requirements.
  • Tubular Furnace ST 1002540
  • Furnace that reaches up to 1150ºC thanks to refractory components. Equipped with wax evacuation tray, wax gathering drawer and gas exhausting evacuation system.
  • Mini Tubular Furnace
  • Inert Atmosphere Chamber: Chamber with low humidity and oxygen levels for chemical and physical processes. Equipped with a SMA AC 6000 Spinner.
  • Chemical Hood: Hood with highly controlled humidity.
  • Dip Coater DipMaster 201: Accommodates substrates up to 12" x 12", with a withdrawal speed range of 0.5" to 4.0" per minute and a manual temperature control with a maximum infrared oven temperature of 80º

Use of the Service in 2019

The Nanoquim Platform has been used for a total of 3,156 hours, and the equipment for 4,169 hours, corresponding to 1,841 experiments, 1,242 of which were of self-user experiments, 457 experiments with technical support, and 142 experiments performed by the technicians. The average experiment duration is 2.26 hours 

A total of 133 active users have used the Nanoquim Platform, corresponding to 111 internal users and 22 external users (other research centers, universities and companies).

The experiments are distributed as follows: 728 Superconducting Materials and Large Scale Nanostructures (SUMAN), 287 Magnetic Materials and Functional Oxides (MULFOX and ACNM), 271 Crystallography and CMEOS, 215 Molecular Nanoscience and Organic Materials (NANOMOL), 190 Nanostructured Materials for Optoelectronics and Energy Harvesting (NANOPTO and LASER), 75 Molecular and Supramolecular Materials (NN, FUNNANOSURF and LMI), 21 Solid State Chemistry (SSC) 54 by external users: companies (2), other research centers (3) and universities (49).

Outreach, publications and projects in which the service has participated

The Nanoquim Platform participated in many outreach activities during 2019, including visits for highschool students, the “Programa Argó” organized by the UAB, which consists of a theoretical and practical training for highschool students in July, and the open doors of the Scientific and Technical Services at the ICMAB (28 October 2019), in which the Nanoquim Platform presented two posters, one about the nanfabrication processes and the other about the characterization of materials.

The service is co-author of the following publication: Sterilization Procedure for Temperature-Sensitive Hydrogels Loaded with Silver Nanoparticles for Clinical Applications. Diana Rafael, Fernanda Andrade, Francesc Martinez-Trucharte, Jana Basas, Joaquín Seras-Franzoso, Marta Palau, Xavier Gomis, Marc Pérez-Burgos, Alberto Blanco, Alba López-Fernández, Roberto Vélez, Ibane Abasolo, Màrius Aguirre, Joan Gavaldà and Simó Schwartz Jr. Nanomaterials 2019, 9 (3), 380.

Anna May-Masnou This email address is being protected from spambots. You need JavaScript enabled to view it.
Anna May-Masnou This email address is being protected from spambots. You need JavaScript enabled to view it.
Web & Graphic Editor
José Antonio Gómez  This email address is being protected from spambots. You need JavaScript enabled to view it.

José Antonio Gómez This email address is being protected from spambots. You need JavaScript enabled to view it.
Albert Moreno     This email address is being protected from spambots. You need JavaScript enabled to view it.